Comment drytek2 SNF 2005-12-10 08:11:48: ran 2 min Poly etch, no sparks. looks normal

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Sat Dec 10 08:11:49 PST 2005

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I ran 3 runs (2 min each) of the poly etch program 2, did not notice anything unusual with the plasma.

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