Problem drytek2 SNF 2005-12-10 14:17:48: ok, now the pressure won't adjust during run

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Sat Dec 10 14:17:49 PST 2005


The position gage is pegged out at 100, as if the valve is stuck open. process pressure for o2 descum stuck at 56, process pressure for poly etch stuck at 107mT.




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