Problem drytek2 SNF 2005-12-10 06:40:52: Sparks in the chamber
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Mon Dec 12 11:01:52 PST 2005
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Problem drytek2 SNF 2005-12-10 06:40:52: Sparks in the chamber
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Comment drytek2 SNF 2005-12-10 08:11:48: ran 2 min Poly etch, no sparks. looks normal
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Problem drytek2 SNF 2005-12-10 06:40:52: Sparks in the chamber
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Comment drytek2 SNF 2005-12-10 08:11:48: ran 2 min Poly etch, no sparks. looks normal
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