From eenriquez at snf.stanford.edu  Mon Jan  3 15:59:35 2005
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 3 Jan 2005 15:59:35 -0800
Subject: Comment drytek2 SNF 2005-01-03 15:59:35: Work done during shutdown
Message-ID: <mailman.577.1357938287.25682.drytek2-pcs@snf.stanford.edu>

Wet cleaned the chamber.  Serviced vacuum pump



From axiu at snf.stanford.edu  Mon Jan 17 08:36:43 2005
From: axiu at snf.stanford.edu (axiu at snf.stanford.edu)
Date: Mon, 17 Jan 2005 08:36:43 -0800
Subject: Problem drytek2 SNF 2005-01-17 08:36:42: does not etch
Message-ID: <mailman.578.1357938287.25682.drytek2-pcs@snf.stanford.edu>




From eenriquez at snf.stanford.edu  Tue Jan 18 13:46:29 2005
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 18 Jan 2005 13:46:29 -0800
Subject: Problem drytek2 SNF 2005-01-17 08:36:42: does not etch
Message-ID: <mailman.579.1357938287.25682.drytek2-pcs@snf.stanford.edu>

no problem found