From cbaxter at snf.stanford.edu Tue Mar 1 18:49:56 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 1 Mar 2005 18:49:56 -0800 Subject: Shutdown drytek2 SNF 2005-03-01 18:49:55: routin maint. Message-ID: From cbaxter at snf.stanford.edu Tue Mar 1 19:33:30 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 1 Mar 2005 19:33:30 -0800 Subject: Shutdown drytek2 SNF 2005-03-01 18:49:55: routin maint. Message-ID: completed oil changed From grupp at snf.stanford.edu Mon Mar 7 12:39:10 2005 From: grupp at snf.stanford.edu (grupp at snf.stanford.edu) Date: Mon, 7 Mar 2005 12:39:10 -0800 Subject: Problem drytek2 SNF 2005-03-07 12:39:09: bad Cycle Start switch Message-ID: it's finicky. From cbaxter at snf.stanford.edu Mon Mar 7 18:55:13 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 7 Mar 2005 18:55:13 -0800 Subject: Problem drytek2 SNF 2005-03-07 12:39:09: bad Cycle Start switch Message-ID: cycled is working fine. i reseated the microswitch From lindaw at snf.stanford.edu Fri Mar 11 12:09:11 2005 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Fri, 11 Mar 2005 12:09:11 -0800 Subject: Comment drytek2 SNF 2005-03-11 12:09:10: ceramic spacers in front of chamber are all burnt. Message-ID: I just noticed this. It may have been like this for a while. From tejask at snf.stanford.edu Thu Mar 24 03:07:16 2005 From: tejask at snf.stanford.edu (tejask at snf.stanford.edu) Date: Thu, 24 Mar 2005 03:07:16 -0800 Subject: Shutdown drytek2 SNF 2005-03-24 03:07:15: mechanical pump and blower buttons turned off during process Message-ID: Running process 2 with CF4. At the end of the process, the mech pump and blower turned off. Recovered the wafer, switched off the RF power and turned off the gases. Did not attempt to put system into standby. From eenriquez at snf.stanford.edu Thu Mar 24 08:32:52 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 24 Mar 2005 08:32:52 -0800 Subject: Shutdown drytek2 SNF 2005-03-24 03:07:15: mechanical pump and blower buttons turned off during process Message-ID: emptied exhaust demister and re-started pump and blower. From lindaw at snf.stanford.edu Fri Mar 25 12:36:04 2005 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Fri, 25 Mar 2005 12:36:04 -0800 Subject: Comment drytek2 SNF 2005-03-25 12:36:03: Message-ID: From yeh at snf.stanford.edu Mon Mar 28 18:40:34 2005 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Mon, 28 Mar 2005 18:40:34 -0800 Subject: Comment drytek2 SNF 2005-03-28 18:40:34: ref. pwr higher than usual Message-ID: for descum process. used to be easy to get down to 20-40W but now 60W seems to be the lowest. From lindaw at snf.stanford.edu Tue Mar 29 14:10:41 2005 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Tue, 29 Mar 2005 14:10:41 -0800 Subject: Problem drytek2 SNF 2005-03-29 14:10:40: ceramic piece on the front of one of the plates Message-ID: has fallen off. Looks like the others are not far behind. From eenriquez at snf.stanford.edu Tue Mar 29 15:45:30 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 29 Mar 2005 15:45:30 -0800 Subject: Problem drytek2 SNF 2005-03-29 14:10:40: ceramic piece on the front of one of the plates Message-ID: Repaired teflon clips. From eenriquez at snf.stanford.edu Tue Mar 29 15:45:57 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 29 Mar 2005 15:45:57 -0800 Subject: Comment drytek2 SNF 2005-01-03 15:59:35: Work done during shutdown Message-ID: ok