Shutdown drytek2 SNF 2005-03-24 03:07:15: mechanical pump and blower buttons turned off during process

tejask at snf.stanford.edu tejask at snf.stanford.edu
Thu Mar 24 03:07:16 PST 2005

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Running process 2 with CF4. At the end of the process, the mech pump and blower turned off. Recovered the wafer, switched off the RF power and turned off the gases. Did not attempt to put system into standby.

Previous message: Comment drytek2 SNF 2005-03-11 12:09:10: ceramic spacers in front of chamber are all burnt.
Next message: Shutdown drytek2 SNF 2005-03-24 03:07:15: mechanical pump and blower buttons turned off during process
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