Shutdown drytek2 SNF 2005-03-24 03:07:15: mechanical pump and blower buttons turned off during process

tejask at snf.stanford.edu tejask at snf.stanford.edu
Thu Mar 24 03:07:16 PST 2005


Running process 2 with CF4. At the end of the process, the mech pump and blower turned off. Recovered the wafer, switched off the RF power and turned off the gases. Did not attempt to put system into standby.




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