From hopcroft at snf.stanford.edu  Mon Nov 28 19:08:06 2005
From: hopcroft at snf.stanford.edu (hopcroft at snf.stanford.edu)
Date: Mon, 28 Nov 2005 19:08:06 -0800
Subject: Problem drytek2 SNF 2005-11-28 19:08:06: RF power indicator light is out
Message-ID: <mailman.642.1357938287.25682.drytek2-pcs@snf.stanford.edu>

RF power is working fine even though red indicator light does not turn on.



From xzhuan1 at snf.stanford.edu  Mon Nov 28 20:09:00 2005
From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu)
Date: Mon, 28 Nov 2005 20:09:00 -0800
Subject: Problem drytek2 SNF 2005-11-28 20:09:00: can't adjust pressure
Message-ID: <mailman.643.1357938287.25682.drytek2-pcs@snf.stanford.edu>

can't control chamber pressure by adjusting nobs.



From eenriquez at snf.stanford.edu  Tue Nov 29 15:39:44 2005
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 29 Nov 2005 15:39:44 -0800
Subject: Problem drytek2 SNF 2005-11-28 20:09:00: can't adjust pressure
Message-ID: <mailman.644.1357938287.25682.drytek2-pcs@snf.stanford.edu>

Throttle valve is getting stuck.  Cycled valve fully open and close.  Valve controlling OK now.  Will rebuild the valve during the shutdown.  



From eenriquez at snf.stanford.edu  Tue Nov 29 15:45:25 2005
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 29 Nov 2005 15:45:25 -0800
Subject: Problem drytek2 SNF 2005-11-28 19:08:06: RF power indicator light is out
Message-ID: <mailman.645.1357938287.25682.drytek2-pcs@snf.stanford.edu>

Replaced burnt out indicator light.



From dsoto at snf.stanford.edu  Tue Nov 29 17:07:04 2005
From: dsoto at snf.stanford.edu (dsoto at snf.stanford.edu)
Date: Tue, 29 Nov 2005 17:07:04 -0800
Subject: Problem drytek2 SNF 2005-11-29 17:07:03: cannot adjust pressure
Message-ID: <mailman.646.1357938287.25682.drytek2-pcs@snf.stanford.edu>

using process 1 O2 plasma.  



From cbaxter at snf.stanford.edu  Tue Nov 29 17:15:29 2005
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Tue, 29 Nov 2005 17:15:29 -0800
Subject: Problem drytek2 SNF 2005-11-29 17:07:03: cannot adjust pressure
Message-ID: <mailman.647.1357938287.25682.drytek2-pcs@snf.stanford.edu>




From bongsang at snf.stanford.edu  Tue Nov 29 18:23:41 2005
From: bongsang at snf.stanford.edu (bongsang at snf.stanford.edu)
Date: Tue, 29 Nov 2005 18:23:41 -0800
Subject: Problem drytek2 SNF 2005-11-29 18:23:40: pressure cannot be adjusted
Message-ID: <mailman.648.1357938287.25682.drytek2-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Tue Nov 29 19:24:47 2005
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Tue, 29 Nov 2005 19:24:47 -0800
Subject: Problem drytek2 SNF 2005-11-29 18:23:40: pressure cannot be adjusted
Message-ID: <mailman.649.1357938287.25682.drytek2-pcs@snf.stanford.edu>

reset pressure controller and test with different pressure
set without a problem.



From bongsang at snf.stanford.edu  Wed Nov 30 10:28:42 2005
From: bongsang at snf.stanford.edu (bongsang at snf.stanford.edu)
Date: Wed, 30 Nov 2005 10:28:42 -0800
Subject: Problem drytek2 SNF 2005-11-30 10:28:42: cannot adjust pressure and flow, RF
Message-ID: <mailman.650.1357938287.25682.drytek2-pcs@snf.stanford.edu>




From eenriquez at snf.stanford.edu  Wed Nov 30 16:00:30 2005
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 30 Nov 2005 16:00:30 -0800
Subject: Problem drytek2 SNF 2005-11-30 10:28:42: cannot adjust pressure and flow, RF
Message-ID: <mailman.651.1357938287.25682.drytek2-pcs@snf.stanford.edu>

Changed mechanical pump oil.