From king at snf.stanford.edu  Fri Sep  2 16:14:02 2005
From: king at snf.stanford.edu (king at snf.stanford.edu)
Date: Fri, 2 Sep 2005 16:14:02 -0700
Subject: Problem drytek2 SNF 2005-09-02 16:14:01: Drytek2 process 3 light is out
Message-ID: <mailman.632.1357938287.25682.drytek2-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Fri Sep  2 17:35:44 2005
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Fri, 2 Sep 2005 17:35:44 -0700
Subject: Problem drytek2 SNF 2005-09-02 16:14:01: Drytek2 process 3 light is out
Message-ID: <mailman.633.1357938287.25682.drytek2-pcs@snf.stanford.edu>

changed light bulb.



From sourav at snf.stanford.edu  Sat Sep  3 11:01:47 2005
From: sourav at snf.stanford.edu (sourav at snf.stanford.edu)
Date: Sat, 3 Sep 2005 11:01:47 -0700
Subject: Problem drytek2 SNF 2005-09-03 11:01:46: wafer piece inside 
Message-ID: <mailman.634.1357938287.25682.drytek2-pcs@snf.stanford.edu>

one of my wafer piece slides off through the stopping pins and falls inside the chamber. Couldn't see it as it is in the back side of the chamber.



From eenriquez at snf.stanford.edu  Tue Sep  6 09:31:40 2005
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 6 Sep 2005 09:31:40 -0700
Subject: Problem drytek2 SNF 2005-09-03 11:01:46: wafer piece inside 
Message-ID: <mailman.635.1357938287.25682.drytek2-pcs@snf.stanford.edu>

Removed wafer piece from the bottom of the chamber.



From lindaw at snf.stanford.edu  Mon Sep 19 15:18:33 2005
From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu)
Date: Mon, 19 Sep 2005 15:18:33 -0700
Subject: Problem drytek2 SNF 2005-09-19 15:18:30: door hinge loose
Message-ID: <mailman.636.1357938287.25682.drytek2-pcs@snf.stanford.edu>

it appears that a pin has fallen out of the lower door hinge.



From eenriquez at snf.stanford.edu  Tue Sep 20 08:26:02 2005
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 20 Sep 2005 08:26:02 -0700
Subject: Shutdown drytek2 SNF 2005-09-20 08:26:01: Repairing door
Message-ID: <mailman.637.1357938287.25682.drytek2-pcs@snf.stanford.edu>




From eenriquez at snf.stanford.edu  Wed Sep 21 15:40:10 2005
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 21 Sep 2005 15:40:10 -0700
Subject: Shutdown drytek2 SNF 2005-09-20 08:26:01: Repairing door
Message-ID: <mailman.638.1357938287.25682.drytek2-pcs@snf.stanford.edu>

Completed door repair.  Ran a 5 min O2 plasma.



From eenriquez at snf.stanford.edu  Wed Sep 21 15:51:52 2005
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 21 Sep 2005 15:51:52 -0700
Subject: Problem drytek2 SNF 2005-09-19 15:18:30: door hinge loose
Message-ID: <mailman.639.1357938287.25682.drytek2-pcs@snf.stanford.edu>

Replaced broken door hinge pin.