Problem drytek2 SNF 2005-09-03 11:01:46: wafer piece inside

sourav at snf.stanford.edu sourav at snf.stanford.edu
Sat Sep 3 11:01:47 PDT 2005


one of my wafer piece slides off through the stopping pins and falls inside the chamber. Couldn't see it as it is in the back side of the chamber.




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