Shutdown drytek2 SNF 2006-04-20 15:28:57: Gases 1,2, and 3 don't flow

kenney at snf.stanford.edu kenney at snf.stanford.edu
Thu Apr 20 15:28:58 PDT 2006


Gases CF4, SF6, and F22 do not seem to flow. At
best they flow for a minute or so and then drop to zero.
I tried both processes 2(poly) and 3(isotropic Si) with the 
same result.




More information about the drytek2-pcs mailing list