From latta at snf.stanford.edu Fri Aug 4 09:13:00 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 4 Aug 2006 09:13:00 -0700 Subject: Problem drytek2 SNF 2006-07-24 22:09:41: Can not change pressure Message-ID: see user king's comment. From vipin at snf.stanford.edu Mon Aug 7 11:39:45 2006 From: vipin at snf.stanford.edu (vipin at snf.stanford.edu) Date: Mon, 7 Aug 2006 11:39:45 -0700 Subject: Problem drytek2 SNF 2006-08-07 11:39:44: process 2 problem Message-ID: The reflected power is too high. Close to 300. Cannot etch if this junk keeps showing this problem. From mmager at snf.stanford.edu Fri Aug 11 17:29:11 2006 From: mmager at snf.stanford.edu (mmager at snf.stanford.edu) Date: Fri, 11 Aug 2006 17:29:11 -0700 Subject: Problem drytek2 SNF 2006-08-11 17:29:11: process 2 more problems Message-ID: I tried several times to run process 2 w/ normal procedure. Each time it would arc plasma for a second, then turn the power and the gases off. I tried turning the power way down before starting the cycle, then turning it up after the timer starts. This worked, but I've never had to do that before. From me342e at snf.stanford.edu Sun Aug 13 19:28:16 2006 From: me342e at snf.stanford.edu (me342e at snf.stanford.edu) Date: Sun, 13 Aug 2006 19:28:16 -0700 Subject: Problem drytek2 SNF 2006-08-13 19:28:15: Process 3 pressure dial having no effect Message-ID: The pressure for Process 3 is not changing as the dial is rotated. Currently stuck @ 67-70 mtorr. From eenriquez at snf.stanford.edu Mon Aug 14 09:13:47 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 14 Aug 2006 09:13:47 -0700 Subject: Problem drytek2 SNF 2006-08-07 11:39:44: process 2 problem Message-ID: Lowered chamber pressure from 350 to 150 mT (standard pressure) and ran process 2 three times with no problems. Reflected power was 20 W for all three runs. From eenriquez at snf.stanford.edu Mon Aug 14 09:15:02 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 14 Aug 2006 09:15:02 -0700 Subject: Problem drytek2 SNF 2006-07-26 20:56:10: process 2 timer not working Message-ID: Ran process 2 three times at different timer settings at 2 , 10 and 20 minutes with no problems. From eenriquez at snf.stanford.edu Mon Aug 14 09:27:26 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 14 Aug 2006 09:27:26 -0700 Subject: Problem drytek2 SNF 2006-08-11 17:29:11: process 2 more problems Message-ID: Ran procees 2 three times with no problems. From eenriquez at snf.stanford.edu Mon Aug 14 09:29:44 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 14 Aug 2006 09:29:44 -0700 Subject: Problem drytek2 SNF 2006-08-13 19:28:15: Process 3 pressure dial having no effect Message-ID: Use the Auto mode on the MKS controller instead of "EXT". This a temporary change in the procedure until we repair the MKS controller From aokyay at snf.stanford.edu Tue Aug 15 23:20:39 2006 From: aokyay at snf.stanford.edu (aokyay at snf.stanford.edu) Date: Tue, 15 Aug 2006 23:20:39 -0700 Subject: Shutdown drytek2 SNF 2006-08-15 23:20:38: the chamber and the electrodes too hot Message-ID: burned the resist, waited for an hour, but did not cool down. electrodes are still quite hot... From eenriquez at snf.stanford.edu Wed Aug 16 08:13:18 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 16 Aug 2006 08:13:18 -0700 Subject: Shutdown drytek2 SNF 2006-08-15 23:20:38: the chamber and the electrodes too hot Message-ID: The electrode water chiller had a fault. Cleared fault and ran an O2 plasma for 10 minutes to verify that the electrodes remained cool. From yoonjin at snf.stanford.edu Thu Aug 17 18:07:23 2006 From: yoonjin at snf.stanford.edu (yoonjin at snf.stanford.edu) Date: Thu, 17 Aug 2006 18:07:23 -0700 Subject: Problem drytek2 SNF 2006-08-17 18:07:18: mechanical pump is not on Message-ID: I'll not proceed.. From cbaxter at snf.stanford.edu Thu Aug 17 19:03:50 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 17 Aug 2006 19:03:50 -0700 Subject: Problem drytek2 SNF 2006-08-17 18:07:18: mechanical pump is not on Message-ID: Mechanical pump was on, light buld was burned out. Changed light buld. From cbaxter at snf.stanford.edu Mon Aug 28 08:00:19 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 28 Aug 2006 08:00:19 -0700 Subject: Shutdown drytek2 SNF 2006-08-28 08:00:19: Shutdown for Sf6 cylinder change Message-ID: From cbaxter at snf.stanford.edu Mon Aug 28 08:52:51 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 28 Aug 2006 08:52:51 -0700 Subject: Shutdown drytek2 SNF 2006-08-28 08:00:19: Shutdown for Sf6 cylinder change Message-ID: Sf6 cylinder changed completed