Shutdown drytek2 SNF 2006-08-15 23:20:38: the chamber and the electrodes too hot
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Wed Aug 16 08:13:18 PDT 2006
The electrode water chiller had a fault. Cleared fault and ran an O2 plasma for 10 minutes to verify that the electrodes remained cool.
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