Shutdown drytek2 SNF 2006-08-15 23:20:38: the chamber and the electrodes too hot

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Aug 16 08:13:18 PDT 2006


The electrode water chiller had a fault.  Cleared fault and ran an O2 plasma for 10 minutes to verify that the electrodes remained cool. 




More information about the drytek2-pcs mailing list