From aokyay at snf.stanford.edu Thu Feb 2 18:38:32 2006 From: aokyay at snf.stanford.edu (aokyay at snf.stanford.edu) Date: Thu, 2 Feb 2006 18:38:32 -0800 Subject: Problem drytek2 SNF 2006-02-02 18:38:32: door problem Message-ID: Found the machine in poor condition. Was vented and the standby and wafer clear buttons were lit. The door is loose. Talked to previous users in coral (ee410) and they did not have any such problem. Except that the door got stuck and perhaps that's why its loose now? Not sure who or what happened. From kcrabb at snf.stanford.edu Fri Feb 3 17:09:44 2006 From: kcrabb at snf.stanford.edu (kcrabb at snf.stanford.edu) Date: Fri, 3 Feb 2006 17:09:44 -0800 Subject: Problem drytek2 SNF 2006-02-03 17:09:43: rever power 60 Message-ID: using a nitride etch in process 3, I could only get the reverse power down to 60, regardless of the coil and cap settings From skoh at snf.stanford.edu Sat Feb 4 12:14:09 2006 From: skoh at snf.stanford.edu (skoh at snf.stanford.edu) Date: Sat, 4 Feb 2006 12:14:09 -0800 Subject: Problem drytek2 SNF 2006-02-04 12:14:08: Process 2 reflected power very high Message-ID: The reflected power was about 300W. Since I could not get it much lower quickly, I ended the process. From skoh at snf.stanford.edu Sat Feb 4 12:15:59 2006 From: skoh at snf.stanford.edu (skoh at snf.stanford.edu) Date: Sat, 4 Feb 2006 12:15:59 -0800 Subject: Problem drytek2 SNF 2006-02-04 12:15:58: Bottom Door Screw has fallen off Message-ID: Bottom door screw near hinge has fallen off. From cbaxter at snf.stanford.edu Mon Feb 6 09:21:26 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 6 Feb 2006 09:21:26 -0800 Subject: Shutdown drytek2 SNF 2006-02-06 09:21:25: chamber door hinge need to be repair. Message-ID: From cbaxter at snf.stanford.edu Mon Feb 6 12:11:05 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 6 Feb 2006 12:11:05 -0800 Subject: Shutdown drytek2 SNF 2006-02-06 09:21:25: chamber door hinge need to be repair. Message-ID: repaired dooe hinges From cbaxter at snf.stanford.edu Mon Feb 6 12:11:10 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 6 Feb 2006 12:11:10 -0800 Subject: Problem drytek2 SNF 2006-02-04 12:15:58: Bottom Door Screw has fallen off Message-ID: From cbaxter at snf.stanford.edu Mon Feb 6 12:11:20 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 6 Feb 2006 12:11:20 -0800 Subject: Problem drytek2 SNF 2006-02-04 12:14:08: Process 2 reflected power very high Message-ID: From cbaxter at snf.stanford.edu Mon Feb 6 12:11:40 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 6 Feb 2006 12:11:40 -0800 Subject: Problem drytek2 SNF 2006-02-03 17:09:43: rever power 60 Message-ID: From cbaxter at snf.stanford.edu Mon Feb 6 12:11:45 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 6 Feb 2006 12:11:45 -0800 Subject: Problem drytek2 SNF 2006-02-02 18:38:32: door problem Message-ID: From yzhu at snf.stanford.edu Thu Feb 9 10:57:20 2006 From: yzhu at snf.stanford.edu (yzhu at snf.stanford.edu) Date: Thu, 9 Feb 2006 10:57:20 -0800 Subject: Problem drytek2 SNF 2006-02-09 10:57:20: Drytek2 process 2 timer doesn't work Message-ID: From cbaxter at snf.stanford.edu Thu Feb 9 11:37:08 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 9 Feb 2006 11:37:08 -0800 Subject: Problem drytek2 SNF 2006-02-09 10:57:20: Drytek2 process 2 timer doesn't work Message-ID: thumbwheel timer was not on detent. From yzhu at snf.stanford.edu Sat Feb 18 02:55:49 2006 From: yzhu at snf.stanford.edu (yzhu at snf.stanford.edu) Date: Sat, 18 Feb 2006 02:55:49 -0800 Subject: Problem drytek2 SNF 2006-02-18 02:55:48: There is no power for Process 2 Message-ID: Process 1 and Process 3 are ok. From lindaw at snf.stanford.edu Sat Feb 18 11:54:52 2006 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sat, 18 Feb 2006 11:54:52 -0800 Subject: Comment drytek2 SNF 2006-02-18 11:54:51: process 2 power is fine. Message-ID: From cbaxter at snf.stanford.edu Mon Feb 20 18:32:41 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 20 Feb 2006 18:32:41 -0800 Subject: Problem drytek2 SNF 2006-02-18 02:55:48: There is no power for Process 2 Message-ID: verified power on process and it tuning fined and was able to adjust power to 500watts without a problem. From cbaxter at snf.stanford.edu Mon Feb 20 18:32:50 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 20 Feb 2006 18:32:50 -0800 Subject: Comment drytek2 SNF 2006-02-18 11:54:51: process 2 power is fine. Message-ID: