From kimsora at snf.stanford.edu Sun Jan 8 19:41:51 2006 From: kimsora at snf.stanford.edu (kimsora at snf.stanford.edu) Date: Sun, 8 Jan 2006 19:41:51 -0800 Subject: Problem drytek2 SNF 2006-01-08 19:41:51: hardware manager error Message-ID: Return value exceeds limits. Cannot enable the machine. From lindaw at snf.stanford.edu Mon Jan 9 09:42:03 2006 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Mon, 9 Jan 2006 09:42:03 -0800 Subject: Problem drytek2 SNF 2006-01-09 09:42:03: Hardware manager error Message-ID: I cannot enable drytek2. I have no problems enabling equipment in the litho area. From shott at stanford.edu Mon Jan 9 09:47:52 2006 From: shott at stanford.edu (John Shott) Date: Mon, 09 Jan 2006 09:47:52 -0800 Subject: Problem drytek2 SNF 2006-01-09 09:42:03: Hardware manager error In-Reply-To: <200601091742.k09Hg5JS019562@smtp3.Stanford.EDU> References: <200601091742.k09Hg5JS019562@smtp3.Stanford.EDU> Message-ID: <43C2A1C8.8080106@stanford.edu> An HTML attachment was scrubbed... URL: From cbaxter at snf.stanford.edu Mon Jan 9 09:54:33 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 9 Jan 2006 09:54:33 -0800 Subject: Problem drytek2 SNF 2006-01-09 09:42:03: Hardware manager error Message-ID: plugged phone jack cable to coral box. From cbaxter at snf.stanford.edu Mon Jan 9 09:54:38 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 9 Jan 2006 09:54:38 -0800 Subject: Problem drytek2 SNF 2006-01-08 19:41:51: hardware manager error Message-ID: From cbaxter at snf.stanford.edu Wed Jan 18 08:22:54 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 18 Jan 2006 08:22:54 -0800 Subject: Shutdown drytek2 SNF 2006-01-18 08:22:54: sf6 cylidner change Message-ID: From cbaxter at snf.stanford.edu Wed Jan 18 08:40:44 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 18 Jan 2006 08:40:44 -0800 Subject: Shutdown drytek2 SNF 2006-01-18 08:22:54: sf6 cylidner change Message-ID: sf6 cylinder changed completed. From lindaw at snf.stanford.edu Mon Jan 23 13:50:15 2006 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Mon, 23 Jan 2006 13:50:15 -0800 Subject: Problem drytek2 SNF 2006-01-23 13:50:14: pressure position gage maxed out Message-ID: presure set for 150 mT, can only get 109 while running poly etch, SF6 117 sccm, and F22 51 sccm. From lindaw at snf.stanford.edu Mon Jan 23 13:51:53 2006 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Mon, 23 Jan 2006 13:51:53 -0800 Subject: Problem drytek2 SNF 2006-01-23 13:51:52: Oh yea, can only get 48 mT with o2 flow 100 sccm Message-ID: From eenriquez at snf.stanford.edu Mon Jan 23 19:26:56 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 23 Jan 2006 19:26:56 -0800 Subject: Comment drytek2 SNF 2005-12-13 23:19:58: Changed oil Message-ID: From eenriquez at snf.stanford.edu Mon Jan 23 21:18:42 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 23 Jan 2006 21:18:42 -0800 Subject: Problem drytek2 SNF 2006-01-23 13:51:52: Oh yea, can only get 48 mT with o2 flow 100 sccm Message-ID: Throttle valve was stuck. Cleaned throttle valve. Ran 4 etch cycles with no problems From eenriquez at snf.stanford.edu Mon Jan 23 21:18:56 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 23 Jan 2006 21:18:56 -0800 Subject: Problem drytek2 SNF 2006-01-23 13:50:14: pressure position gage maxed out Message-ID: Throttle valve was stuck. Cleaned throttle valve. Ran 4 etch cycles with no problems