Problem drytek2 SNF 2006-01-23 13:50:14: pressure position gage maxed out

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Mon Jan 23 13:50:15 PST 2006


presure set for 150 mT, can only get 109 while running poly etch, SF6 117 sccm, and F22 51 sccm.




More information about the drytek2-pcs mailing list