Problem drytek2 SNF 2006-01-23 13:50:14: pressure position gage maxed out

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Mon Jan 23 13:50:15 PST 2006

Previous message: Shutdown drytek2 SNF 2006-01-18 08:22:54: sf6 cylidner change
Next message: Problem drytek2 SNF 2006-01-23 13:50:14: pressure position gage maxed out
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

presure set for 150 mT, can only get 109 while running poly etch, SF6 117 sccm, and F22 51 sccm.

Previous message: Shutdown drytek2 SNF 2006-01-18 08:22:54: sf6 cylidner change
Next message: Problem drytek2 SNF 2006-01-23 13:50:14: pressure position gage maxed out
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the drytek2-pcs mailing list