Problem drytek2 SNF 2006-01-23 13:51:52: Oh yea, can only get 48 mT with o2 flow 100 sccm

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Jan 23 21:18:42 PST 2006


Throttle valve was stuck. Cleaned throttle valve.  Ran 4 etch cycles with no problems




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