Problem drytek2 SNF 2006-01-23 13:50:14: pressure position gage maxed out

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Jan 23 21:18:56 PST 2006

Previous message: Problem drytek2 SNF 2006-01-23 13:50:14: pressure position gage maxed out
Next message: Problem drytek2 SNF 2006-01-23 13:51:52: Oh yea, can only get 48 mT with o2 flow 100 sccm
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Throttle valve was stuck. Cleaned throttle valve.  Ran 4 etch cycles with no problems

Previous message: Problem drytek2 SNF 2006-01-23 13:50:14: pressure position gage maxed out
Next message: Problem drytek2 SNF 2006-01-23 13:51:52: Oh yea, can only get 48 mT with o2 flow 100 sccm
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the drytek2-pcs mailing list