From latta at snf.stanford.edu Wed Jul 5 16:20:23 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 5 Jul 2006 16:20:23 -0700 Subject: Problem drytek2 SNF 2006-07-05 16:20:20: couldn't get chamber press over 79 for #3 Message-ID: Was set to ext (isn't it supposed to be?)...... From eenriquez at snf.stanford.edu Wed Jul 5 17:54:04 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 5 Jul 2006 17:54:04 -0700 Subject: Problem drytek2 SNF 2006-07-05 16:20:20: couldn't get chamber press over 79 for #3 Message-ID: Normally the knob needs to be set on EXT but until the MKS controller is repaired, the knob needs to be in Auto during process and EXT when in Standby. From xzhuan1 at snf.stanford.edu Fri Jul 7 19:14:10 2006 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Fri, 7 Jul 2006 19:14:10 -0700 Subject: Problem drytek2 SNF 2006-07-07 19:14:10: cannot adjust pressure Message-ID: pressure stays at 50 mT. From lindaw at snf.stanford.edu Wed Jul 12 10:29:36 2006 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Wed, 12 Jul 2006 10:29:36 -0700 Subject: Comment drytek2 SNF 2006-07-12 10:29:25: bottom door hinge retaining pin is loose Message-ID: From cbaxter at snf.stanford.edu Wed Jul 12 18:38:27 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 12 Jul 2006 18:38:27 -0700 Subject: Comment drytek2 SNF 2006-07-12 10:29:25: bottom door hinge retaining pin is loose Message-ID: From latta at snf.stanford.edu Thu Jul 13 14:19:27 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 13 Jul 2006 14:19:27 -0700 Subject: Problem drytek2 SNF 2006-07-07 19:14:10: cannot adjust pressure Message-ID: MKS system not working- swich to auto after gases flow. From latta at snf.stanford.edu Thu Jul 13 14:21:02 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 13 Jul 2006 14:21:02 -0700 Subject: Problem drytek2 SNF 2006-06-22 10:36:54: Process 1 pressure is also too low; doesn't respond to the pressure knob Message-ID: MKS needs repair- it'll happen when things cool down on the other tools. From latta at snf.stanford.edu Thu Jul 13 14:22:05 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 13 Jul 2006 14:22:05 -0700 Subject: Problem drytek2 SNF 2006-06-21 23:09:20: Process 3 pressure control Message-ID: See lindw's comment on how to work around the MKS failure. From eenriquez at snf.stanford.edu Mon Jul 17 12:21:15 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 17 Jul 2006 12:21:15 -0700 Subject: Problem drytek2 SNF 2006-06-25 13:27:49: top door hinge pin is broken/missing. Message-ID: Repaired door. Replaced door hinge pins. From king at snf.stanford.edu Mon Jul 17 23:44:09 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Mon, 17 Jul 2006 23:44:09 -0700 Subject: Problem drytek2 SNF 2006-07-17 23:44:08: Won't pump down... Message-ID: unless you throttle in OPEN mode. Then you need to go into AUTO for the correct process pressure. From king at snf.stanford.edu Wed Jul 19 15:08:37 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Wed, 19 Jul 2006 15:08:37 -0700 Subject: Comment drytek2 SNF 2006-07-19 15:08:37: pressure control Message-ID: Process 2 worked using external but process 3 didn't. I tried every which way on #3, then went to #2 and it worked. Was using nitride etch recipe. Must be gremlins. From panjun at snf.stanford.edu Mon Jul 24 22:09:42 2006 From: panjun at snf.stanford.edu (panjun at snf.stanford.edu) Date: Mon, 24 Jul 2006 22:09:42 -0700 Subject: Problem drytek2 SNF 2006-07-24 22:09:41: Can not change pressure Message-ID: From rwoo at snf.stanford.edu Wed Jul 26 20:56:10 2006 From: rwoo at snf.stanford.edu (rwoo at snf.stanford.edu) Date: Wed, 26 Jul 2006 20:56:10 -0700 Subject: Problem drytek2 SNF 2006-07-26 20:56:10: process 2 timer not working Message-ID: The process 2 timer did not stop the etch during my run. This may be an intermittent problem so users should always be ready to manually end the etch with the clear wafer button.