Comment drytek2 SNF 2006-07-19 15:08:37: pressure control
king at snf.stanford.edu
king at snf.stanford.edu
Wed Jul 19 15:08:37 PDT 2006
Process 2 worked using external but process 3 didn't. I tried every which way on #3, then went to #2 and it worked. Was using nitride etch recipe. Must be gremlins.
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