Comment drytek2 SNF 2006-07-19 15:08:37: pressure control

king at snf.stanford.edu king at snf.stanford.edu
Wed Jul 19 15:08:37 PDT 2006


Process 2 worked using external but process 3 didn't.  I tried every which way on #3, then went to #2 and it worked.  Was using nitride etch recipe.  Must be gremlins.




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