From shwong at snf.stanford.edu Fri Jun 9 18:36:34 2006 From: shwong at snf.stanford.edu (shwong at snf.stanford.edu) Date: Fri, 9 Jun 2006 18:36:34 -0700 Subject: Problem drytek2 SNF 2006-06-09 18:36:33: chamber doesn't vent when I press standby Message-ID: Chamber doesn't vent when I press standby. Also, the button "Arm not reset" keeps blinking on and off periodically. I was able to do a plasma descum, but had to microreset and wafer clear many times before i could open the chamber. From eenriquez at snf.stanford.edu Sun Jun 11 08:43:41 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 11 Jun 2006 08:43:41 -0700 Subject: Problem drytek2 SNF 2006-06-09 18:36:33: chamber doesn't vent when I press standby Message-ID: No problem found. Cycled system many times without any problems. From peichen at snf.stanford.edu Wed Jun 14 17:50:58 2006 From: peichen at snf.stanford.edu (peichen at snf.stanford.edu) Date: Wed, 14 Jun 2006 17:50:58 -0700 Subject: Problem drytek2 SNF 2006-06-14 17:50:58: doesn't purge Message-ID: chamber doesn't vent after process. need to hit microreset buttom. Also clear wafer buttom doesn't vent, and standby doesn't pump down. From cbaxter at snf.stanford.edu Thu Jun 15 08:12:39 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 15 Jun 2006 08:12:39 -0700 Subject: Problem drytek2 SNF 2006-06-14 17:50:58: doesn't purge Message-ID: Reset logic pcb and put system on stand by. From rwoo at snf.stanford.edu Thu Jun 15 17:24:32 2006 From: rwoo at snf.stanford.edu (rwoo at snf.stanford.edu) Date: Thu, 15 Jun 2006 17:24:32 -0700 Subject: Problem drytek2 SNF 2006-06-15 17:24:32: chamber does not vent after pressing standby Message-ID: When the chamber is in standby, pressing the standby button does not vent the chamber. You also have to press the micro-reset button to vent the chamber. From cbaxter at snf.stanford.edu Fri Jun 16 16:21:36 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 16 Jun 2006 16:21:36 -0700 Subject: Problem drytek2 SNF 2006-06-15 17:24:32: chamber does not vent after pressing standby Message-ID: From king at snf.stanford.edu Wed Jun 21 23:09:21 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Wed, 21 Jun 2006 23:09:21 -0700 Subject: Problem drytek2 SNF 2006-06-21 23:09:20: Process 3 pressure control Message-ID: After loading wafers the chamber doesn't pump down enough most of the time to begin the next step, flowing gas. Was set to external. Made it work by going to auto. This problem is a repeat from last week. Wafers are just Tox on Si. Also when the chamber starts pumping (after the hard slammiing noise) there's a new tinkling sound as though a small part is loose inside. From shwong at snf.stanford.edu Thu Jun 22 10:36:55 2006 From: shwong at snf.stanford.edu (shwong at snf.stanford.edu) Date: Thu, 22 Jun 2006 10:36:55 -0700 Subject: Problem drytek2 SNF 2006-06-22 10:36:54: Process 1 pressure is also too low; doesn't respond to the pressure knob Message-ID: From lindaw at snf.stanford.edu Sun Jun 25 13:26:16 2006 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sun, 25 Jun 2006 13:26:16 -0700 Subject: Comment drytek2 SNF 2006-06-25 13:26:15: how to get gases to flow correctly Message-ID: On the MKS pressure control module there are 4 knobs on the upper left and three knobs on the lower right of the module. The rigth most knob on the lower right side is set at AUTO to control the gas flow. When it is set in auto, it may not pump down below 100, which is the current set point to start the process gases flowing. If the chamber is not pumping down, set this knob to EXT. The chamber will pump down and start the gases flowing. If left in EXT, it will just pump down to around 50 mT and the pressure control adjustment knobs won't do anything. You have to put this knob back to AUTO once the gases start flowing, and then you can adjust to the desired process pressure.Shorter version, press cycle start, turn lower right knob to EXT. Once gases flowing, put knob back to AUTO. From lindaw at snf.stanford.edu Sun Jun 25 13:27:50 2006 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sun, 25 Jun 2006 13:27:50 -0700 Subject: Problem drytek2 SNF 2006-06-25 13:27:49: top door hinge pin is broken/missing. Message-ID: Use extreme caustion when opening and closing the door.