Problem drytek2 SNF 2006-06-09 18:36:33: chamber doesn't vent when I press standby

shwong at snf.stanford.edu shwong at snf.stanford.edu
Fri Jun 9 18:36:34 PDT 2006


Chamber doesn't vent when I press standby.
Also, the button "Arm not reset" keeps blinking on and off periodically.  I was able to do a plasma descum, but had to microreset and wafer clear many times before i could open the chamber.




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