Problem drytek2 SNF 2006-06-14 17:50:58: doesn't purge

peichen at snf.stanford.edu peichen at snf.stanford.edu
Wed Jun 14 17:50:58 PDT 2006


chamber doesn't  vent after process. need to hit microreset buttom. Also clear wafer buttom doesn't vent, and standby doesn't pump down. 




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