Problem drytek2 SNF 2006-06-21 23:09:20: Process 3 pressure control

king at snf.stanford.edu king at snf.stanford.edu
Wed Jun 21 23:09:21 PDT 2006


After loading wafers the chamber doesn't pump down enough most of the time to begin the next step, flowing gas.  Was set to external.  Made it work by going to auto.  This problem is a repeat from last week.  Wafers are just Tox on Si.
Also when the chamber starts pumping (after the hard slammiing noise) there's a new tinkling sound as though a small part is loose inside.  




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