From cbaxter at snf.stanford.edu Wed Nov 1 07:52:00 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 1 Nov 2006 07:52:00 -0800 Subject: Problem drytek2 SNF 2006-10-31 15:29:52: 2nd platen from top missing rear left pin Message-ID: Installed new teflon pins. From kocabas at snf.stanford.edu Wed Nov 8 12:36:30 2006 From: kocabas at snf.stanford.edu (kocabas at snf.stanford.edu) Date: Wed, 8 Nov 2006 12:36:30 -0800 Subject: Problem drytek2 SNF 2006-11-08 12:36:29: door does move smoothly Message-ID: the chamber door does not close smoothly, does not cause any problems with the process though. pump down works ok. From cbaxter at snf.stanford.edu Wed Nov 8 15:10:41 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 8 Nov 2006 15:10:41 -0800 Subject: Problem drytek2 SNF 2006-11-08 12:36:29: door does move smoothly Message-ID: Door hinge pin came off. From aokyay at snf.stanford.edu Thu Nov 9 10:33:39 2006 From: aokyay at snf.stanford.edu (aokyay at snf.stanford.edu) Date: Thu, 9 Nov 2006 10:33:39 -0800 Subject: Problem drytek2 SNF 2006-11-09 10:33:38: chamber door Message-ID: chamber door is not well aligned From cbaxter at snf.stanford.edu Thu Nov 9 11:41:09 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 9 Nov 2006 11:41:09 -0800 Subject: Problem drytek2 SNF 2006-11-09 10:33:38: chamber door Message-ID: align chamber door. .. From king at snf.stanford.edu Fri Nov 10 21:39:29 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Fri, 10 Nov 2006 21:39:29 -0800 Subject: Comment drytek2 SNF 2006-11-10 21:39:28: SF6 flow, OK now. Message-ID: For some reason it was flowing full throttle even when turned to 0, and the high pressure reading under open throttle reflected the flow rate. Eventually got it to work normally. Maybe the pot's going bad?? FYI... From king at snf.stanford.edu Fri Nov 10 22:40:39 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Fri, 10 Nov 2006 22:40:39 -0800 Subject: Comment drytek2 SNF 2006-11-10 22:40:38: repeat- SF6 pot problem, but OK now Message-ID: This didn't show up on coral so reposting-- The SF6 kept flowing 100% even when turned to 0. High pressure at full open throttle. Eventually it was OK. Maybe the SF6 pot is going bad?? FYI... From bchui at snf.stanford.edu Sat Nov 18 23:28:24 2006 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sat, 18 Nov 2006 23:28:24 -0800 Subject: Problem drytek2 SNF 2006-11-18 23:28:24: Process 2 timer unreliable Message-ID: It sometimes (but not always) stops short of the set time. e.g. if you set it to 13:00, it might stop at 11:00. Watch the etch at all times if critical. From cbaxter at snf.stanford.edu Sun Nov 19 09:33:07 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 19 Nov 2006 09:33:07 -0800 Subject: Problem drytek2 SNF 2006-11-18 23:28:24: Process 2 timer unreliable Message-ID: Cleaned thumbwheel timer..