From barlian at snf.stanford.edu  Fri Apr  6 17:20:14 2007
From: barlian at snf.stanford.edu (barlian at snf.stanford.edu)
Date: Fri, 6 Apr 2007 17:20:14 -0700
Subject: Problem drytek2 SNF 2007-04-06 17:20:14: CF4
Message-ID: <mailman.800.1357938289.25682.drytek2-pcs@snf.stanford.edu>

I was using the Contact Clean Up recipe, CF4 flow started at 100. After a few minutes, it started dropping.. all the way till 0. The deviation light was red, instead of green.



From eenriquez at snf.stanford.edu  Mon Apr  9 08:06:19 2007
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 9 Apr 2007 08:06:19 -0700
Subject: Problem drytek2 SNF 2007-04-06 17:20:14: CF4
Message-ID: <mailman.801.1357938289.25682.drytek2-pcs@snf.stanford.edu>

No problem found.  Ran recipe 3 (O2 + CF4) for 19 min with no problem.  The CF4 valve might not have been turned on.