Problem drytek2 SNF 2007-04-06 17:20:14: CF4

barlian at snf.stanford.edu barlian at snf.stanford.edu
Fri Apr 6 17:20:14 PDT 2007


I was using the Contact Clean Up recipe, CF4 flow started at 100. After a few minutes, it started dropping.. all the way till 0. The deviation light was red, instead of green.




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