Problem drytek2 SNF 2007-04-06 17:20:14: CF4

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Apr 9 08:06:19 PDT 2007


No problem found.  Ran recipe 3 (O2 + CF4) for 19 min with no problem.  The CF4 valve might not have been turned on.




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