From cbaxter at snf.stanford.edu Wed Aug 1 08:22:07 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 1 Aug 2007 08:22:07 -0700 Subject: Problem drytek2 SNF 2007-07-31 20:04:47: The timer keeps counting up Message-ID: Reset cpu and tested using process 1,2 and 3 in sequences w/out problem. From elvislin at snf.stanford.edu Tue Aug 14 13:53:26 2007 From: elvislin at snf.stanford.edu (elvislin at snf.stanford.edu) Date: Tue, 14 Aug 2007 13:53:26 -0700 Subject: Problem drytek2 SNF 2007-08-14 13:53:26: no gas flow for CF4 Message-ID: the deviation led is red light, anything wrong? From cbaxter at snf.stanford.edu Tue Aug 14 16:29:55 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 14 Aug 2007 16:29:55 -0700 Subject: Problem drytek2 SNF 2007-08-14 13:53:26: no gas flow for CF4 Message-ID: The cf4 is ok, the problem was the turn pot was just max out. From kuanlinc at snf.stanford.edu Thu Aug 23 13:57:55 2007 From: kuanlinc at snf.stanford.edu (kuanlinc at snf.stanford.edu) Date: Thu, 23 Aug 2007 13:57:55 -0700 Subject: Comment drytek2 SNF 2007-08-23 13:57:55: No CF4 flow Message-ID: From fengj at snf.stanford.edu Sat Aug 25 06:01:01 2007 From: fengj at snf.stanford.edu (fengj at snf.stanford.edu) Date: Sat, 25 Aug 2007 06:01:01 -0700 Subject: Problem drytek2 SNF 2007-08-25 06:01:01: power drops to zero Message-ID: Ran descum, and power drops to zero several times. Have to turn the power knob to bring the power up, but with large fluctuation. Probably the electrical connection of the knob is loose. From ericp at snf.stanford.edu Sat Aug 25 23:28:56 2007 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Sat, 25 Aug 2007 23:28:56 -0700 Subject: Problem drytek2 SNF 2007-08-25 23:28:55: cycle start button sticks Message-ID: the cycle start button sticks, causing the machine to cycle when it shouldn't. From cbaxter at snf.stanford.edu Mon Aug 27 07:27:22 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 27 Aug 2007 07:27:22 -0700 Subject: Problem drytek2 SNF 2007-08-25 23:28:55: cycle start button sticks Message-ID: power down the tool and cleaned cycle start switch From cbaxter at snf.stanford.edu Mon Aug 27 07:29:33 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 27 Aug 2007 07:29:33 -0700 Subject: Problem drytek2 SNF 2007-08-25 06:01:01: power drops to zero Message-ID: could not duplicate rf problem, i was able tune at 500watts power and run process 1 for 10mins w/out problem. From jrjain at snf.stanford.edu Wed Aug 29 04:37:03 2007 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Wed, 29 Aug 2007 04:37:03 -0700 Subject: Problem drytek2 SNF 2007-08-29 04:37:03: No CF4 Flow Message-ID: Tried full range of flow knob. CF4 flow at 0. From mcvittie at snf.stanford.edu Wed Aug 29 10:34:44 2007 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Wed, 29 Aug 2007 10:34:44 -0700 Subject: Problem drytek2 SNF 2007-08-29 04:37:03: No CF4 Flow Message-ID: No problem found with CF4 flow. Maybe Elmer already took care of the problem. Jim From jrjain at snf.stanford.edu Wed Aug 29 12:01:12 2007 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Wed, 29 Aug 2007 12:01:12 -0700 Subject: Problem drytek2 SNF 2007-08-29 12:01:12: CF4 Message-ID: During Process 3, CF4 came on properly for ~1min, but then flow dropped to 0. From jrjain at snf.stanford.edu Wed Aug 29 12:14:16 2007 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Wed, 29 Aug 2007 12:14:16 -0700 Subject: Comment drytek2 SNF 2007-08-29 12:14:15: CF4 ok now Message-ID: Valve problem From eenriquez at snf.stanford.edu Wed Aug 29 14:57:00 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 29 Aug 2007 14:57:00 -0700 Subject: Problem drytek2 SNF 2007-08-29 12:01:12: CF4 Message-ID: Lower shut-off valve was closed.