Comment drytek2 SNF 2007-01-24 14:13:22: prgm 2 poly recipe reflected power drifting

lindaw at lindaw at
Wed Jan 24 14:13:23 PST 2007

In program 2, running the poly etch recipe, the reflected power is not staying low.  Normally it stays nice and steady once it is tuned. I found that it drifted from 0 to 100 W during the course of a 2 minute etch run.  Very unusual.

More information about the drytek2-pcs mailing list