Problem drytek2 SNF 2007-01-24 22:53:55: One of the plates turns on and off during etching

fatihs at snf.stanford.edu fatihs at snf.stanford.edu
Wed Jan 24 22:53:55 PST 2007


Third plate from the top turned off in the middle of etching, and that changed the power settings. Reflected power increased substantially. After 15 or 20 minutes it turned on again.




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