Problem drytek2 SNF 2007-01-24 22:53:55: One of the plates turns on and off during etching

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Thu Jan 25 10:35:09 PST 2007


Lower electrode assembly and cleaned all rf straps on all
7 electrode. Run 30mins 100sccm O2 and 100sccm CF4
for 30mins @500watts rf power, did not encountered
rf de-tuning.




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