From huangzb at snf.stanford.edu Thu Jul 5 23:25:14 2007 From: huangzb at snf.stanford.edu (huangzb at snf.stanford.edu) Date: Thu, 5 Jul 2007 23:25:14 -0700 Subject: Problem drytek2 SNF 2007-07-05 23:25:14: the light of process 2 burnt out Message-ID: not indicating selection of process 2 From eenriquez at snf.stanford.edu Fri Jul 6 08:28:35 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 6 Jul 2007 08:28:35 -0700 Subject: Problem drytek2 SNF 2007-07-05 23:25:14: the light of process 2 burnt out Message-ID: Replaced light bulb. From jasmine at snf.stanford.edu Mon Jul 9 06:49:36 2007 From: jasmine at snf.stanford.edu (jasmine at snf.stanford.edu) Date: Mon, 9 Jul 2007 06:49:36 -0700 Subject: Problem drytek2 SNF 2007-07-09 06:49:35: no gas flows during etches Message-ID: From eenriquez at snf.stanford.edu Mon Jul 9 08:24:43 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 9 Jul 2007 08:24:43 -0700 Subject: Problem drytek2 SNF 2007-07-09 06:49:35: no gas flows during etches Message-ID: No problem found. Ran O2 and SF6 process for 10 minutes with no problem. From shwong at snf.stanford.edu Mon Jul 9 11:39:07 2007 From: shwong at snf.stanford.edu (shwong at snf.stanford.edu) Date: Mon, 9 Jul 2007 11:39:07 -0700 Subject: Problem drytek2 SNF 2007-07-09 11:39:06: couple problems Message-ID: gases sometime sdon't seem to want to come on; very long pause between start of the cycle and gases coming on. sometimes i just abort that run and start over again RF power for process 2 doesn't come on; i tried anumber od times and ended up using process 3 From cbaxter at snf.stanford.edu Mon Jul 9 16:38:40 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 9 Jul 2007 16:38:40 -0700 Subject: Problem drytek2 SNF 2007-07-09 11:39:06: couple problems Message-ID: Tried recipe#1,2 and 3 without problem From mtang at snf.stanford.edu Tue Jul 10 09:08:51 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 10 Jul 2007 09:08:51 -0700 Subject: Problem drytek2 SNF 2007-07-10 09:08:50: Possble problem with gas flows Message-ID: See previous problem reports. Gas did not come on for two users but no obvious problem found\ (system works.) If you see this problem, contact staff. From cbaxter at snf.stanford.edu Wed Jul 11 15:33:01 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 11 Jul 2007 15:33:01 -0700 Subject: Problem drytek2 SNF 2007-07-10 09:08:50: Possble problem with gas flows Message-ID: Did multiful test using different recipe's combination could not duplicate error. From khanh at snf.stanford.edu Tue Jul 31 20:04:48 2007 From: khanh at snf.stanford.edu (khanh at snf.stanford.edu) Date: Tue, 31 Jul 2007 20:04:48 -0700 Subject: Problem drytek2 SNF 2007-07-31 20:04:47: The timer keeps counting up Message-ID: