Problem drytek2 SNF 2007-07-09 11:39:06: couple problems

shwong at snf.stanford.edu shwong at snf.stanford.edu
Mon Jul 9 11:39:07 PDT 2007


gases sometime sdon't seem to want to come on; very long pause between start of the cycle and gases coming on.  sometimes i just abort that run and start over again
RF power for process 2 doesn't come on; i tried  anumber od times and ended up using process 3




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