From lindaw at snf.stanford.edu  Thu Jun  7 09:22:35 2007
From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu)
Date: Thu, 7 Jun 2007 09:22:35 -0700
Subject: Problem drytek2 SNF 2007-06-07 09:22:35: process 2 forward power limited to 325
Message-ID: <mailman.806.1357938289.25682.drytek2-pcs@snf.stanford.edu>

The forward power won't go above 325, even when the power knob is adjusted to maximum.



From cbaxter at snf.stanford.edu  Thu Jun  7 09:54:47 2007
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Thu, 7 Jun 2007 09:54:47 -0700
Subject: Problem drytek2 SNF 2007-06-07 09:22:35: process 2 forward power limited to 325
Message-ID: <mailman.807.1357938289.25682.drytek2-pcs@snf.stanford.edu>

The reverse power is above 80watts is the reason why 
forward is max out @325watts. I run the same gas and able
to tune to zero reflective with 500watts forward power.



From khanh at snf.stanford.edu  Fri Jun 15 08:40:46 2007
From: khanh at snf.stanford.edu (khanh at snf.stanford.edu)
Date: Fri, 15 Jun 2007 08:40:46 -0700
Subject: Problem drytek2 SNF 2007-06-15 08:40:46: No pressure reading, could not pump
Message-ID: <mailman.808.1357938289.25682.drytek2-pcs@snf.stanford.edu>




From khanh at snf.stanford.edu  Fri Jun 15 09:12:48 2007
From: khanh at snf.stanford.edu (khanh at snf.stanford.edu)
Date: Fri, 15 Jun 2007 09:12:48 -0700
Subject: Problem drytek2 SNF 2007-06-15 09:12:48: The pressure reading is O.K . now
Message-ID: <mailman.809.1357938289.25682.drytek2-pcs@snf.stanford.edu>




From latta at snf.stanford.edu  Fri Jun 15 09:15:44 2007
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Fri, 15 Jun 2007 09:15:44 -0700
Subject: Problem drytek2 SNF 2007-06-15 08:40:46: No pressure reading, could not pump
Message-ID: <mailman.810.1357938289.25682.drytek2-pcs@snf.stanford.edu>

Elmer added oil..



From latta at snf.stanford.edu  Fri Jun 15 09:16:09 2007
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Fri, 15 Jun 2007 09:16:09 -0700
Subject: Problem drytek2 SNF 2007-06-15 09:12:48: The pressure reading is O.K . now
Message-ID: <mailman.811.1357938289.25682.drytek2-pcs@snf.stanford.edu>

Hey!  User follow up.



From lindaw at snf.stanford.edu  Mon Jun 18 10:23:08 2007
From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu)
Date: Mon, 18 Jun 2007 10:23:08 -0700
Subject: Problem drytek2 SNF 2007-06-18 10:23:07: wafers have water condensation on them
Message-ID: <mailman.812.1357938289.25682.drytek2-pcs@snf.stanford.edu>

When i went to remove my wafers after etching poly, they appear to have been overchilled by the cooling water and have a thin layer of condensation on the top surface.  It dried off with the n2 gun.



From eenriquez at snf.stanford.edu  Mon Jun 18 12:08:29 2007
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 18 Jun 2007 12:08:29 -0700
Subject: Problem drytek2 SNF 2007-06-18 10:23:07: wafers have water condensation on them
Message-ID: <mailman.813.1357938289.25682.drytek2-pcs@snf.stanford.edu>

Adjusted chiller temperature to 18 C.  was set to -7.5 C.