Problem drytek2 SNF 2007-06-18 10:23:07: wafers have water condensation on them

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Mon Jun 18 10:23:08 PDT 2007


When i went to remove my wafers after etching poly, they appear to have been overchilled by the cooling water and have a thin layer of condensation on the top surface.  It dried off with the n2 gun.




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