Problem drytek2 SNF 2007-03-16 16:21:29: process pressure fluctuation

lindaw at lindaw at
Fri Mar 16 16:21:29 PDT 2007

The pressure during process is fluctuating quite a bit and will not stablize when set at 150 mT. This occurs with both process 1 running O2 descum, and process 2 running poly etch.

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