Problem drytek2 SNF 2007-03-16 16:21:29: process pressure fluctuation

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Fri Mar 16 16:21:29 PDT 2007


The pressure during process is fluctuating quite a bit and will not stablize when set at 150 mT. This occurs with both process 1 running O2 descum, and process 2 running poly etch.




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