Problem drytek2 SNF 2007-03-17 21:22:38: pressure fluctuation

peichen at snf.stanford.edu peichen at snf.stanford.edu
Sat Mar 17 21:22:38 PDT 2007


Same thing on process 3 for nitride etching. Pressure fluctuats btw 100-300mT for 150mT  set pressure. Plasma on and off due to unstable pressure.




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