Problem drytek2 SNF 2007-05-21 09:44:36: flow can't reach set point 150

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon May 21 11:45:52 PDT 2007


Adjusted the gas flow (recommended = 100 sccm ; actual = 10 sccm.  Also, the pressure setpoint = 220 mT; recommended pressure = 150 mT.




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