Comment drytek2 SNF 2008-04-07 14:15:23: Update

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Apr 7 14:15:23 PDT 2008


Ran poly etch recipe (117 SF6, 51 F22, 400W RF) for 10 minutes with no problems.  Will continue to monitor.




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