Comment drytek2 SNF 2008-04-07 14:15:23: Update

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Apr 7 14:15:23 PDT 2008

Previous message: Problem drytek2 SNF 2008-04-07 11:44:28: SF6 flow is unstable
Next message: Comment drytek2 SNF 2008-04-07 14:15:23: Update
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Ran poly etch recipe (117 SF6, 51 F22, 400W RF) for 10 minutes with no problems.  Will continue to monitor.

Previous message: Problem drytek2 SNF 2008-04-07 11:44:28: SF6 flow is unstable
Next message: Comment drytek2 SNF 2008-04-07 14:15:23: Update
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the drytek2-pcs mailing list