Comment drytek2 SNF 2008-04-09 11:13:49: Completed monthly PM

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Apr 9 11:13:49 PDT 2008


Ran poly etch recipe (uses SF6) for 10 minutes with no problems.  SF6 flow was 117 +/- 1 sccm




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