Problem drytek2 SNF 2008-04-07 11:44:28: SF6 flow is unstable

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Apr 9 11:14:25 PDT 2008


Ran poly etch recipe (uses SF6) for 10 minutes with no problems.  SF6 flow was 117 +/- 1 sccm




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