Comment drytek2 SNF 2008-08-09 16:52:11: Re: Quals

king at snf.stanford.edu king at snf.stanford.edu
Sat Aug 9 16:52:11 PDT 2008


What is the current state of etching for this tool while we wait for some balancing to occur?  Is it etching faster?  More slowly? Uniformity?  Anyone know?  Thanks.




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