Comment drytek2 SNF 2008-07-31 10:21:23: 4500A poly, not 1500A in above write up.
latta at snf.stanford.edu
latta at snf.stanford.edu
Tue Aug 12 13:34:36 PDT 2008
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Problem drytek2 SNF 2008-07-31 10:06:06: etch rate low on 3rd electrode down from top
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Comment drytek2 SNF 2008-08-12 13:40:03: Six electrode qual complete
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Thanks for clarification
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Problem drytek2 SNF 2008-07-31 10:06:06: etch rate low on 3rd electrode down from top
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Comment drytek2 SNF 2008-08-12 13:40:03: Six electrode qual complete
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