Comment drytek2 SNF 2008-08-12 13:40:03: Six electrode qual complete

latta at snf.stanford.edu latta at snf.stanford.edu
Tue Aug 12 13:40:04 PDT 2008


Please see the results in the log book.  You will find Si, PR and thermal oxide etchrates and selectivities.  Also, there is a foirm for labmembers to do the qual and record the results for any or all the electrodes.  The procedure is found on line.




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