From king at snf.stanford.edu Mon Feb 4 18:32:29 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Mon, 4 Feb 2008 18:32:29 -0800 Subject: Problem drytek2 SNF 2008-02-04 18:32:28: No one is filling the chiller Message-ID: It turns off when it runs dry and the plates get hot. I refilled it again (for the second time in two weeks) and am waiting for it to cool. Now I have to run etch rate tests all over again. Please check the chiller and keep it running, thanks. Unhappy lab user. From eenriquez at snf.stanford.edu Tue Feb 5 07:45:30 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 5 Feb 2008 07:45:30 -0800 Subject: Problem drytek2 SNF 2008-02-04 18:32:28: No one is filling the chiller Message-ID: Thank you. From king at snf.stanford.edu Fri Feb 8 18:35:20 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Fri, 8 Feb 2008 18:35:20 -0800 Subject: Problem drytek2 SNF 2008-02-08 18:35:19: Base pressure not reached Message-ID: Process gases begin flowing prematurely at about 75mT. Use Cycle Hold to reach a good base pressure of about 20mT. From nharjee at snf.stanford.edu Sun Feb 10 22:05:06 2008 From: nharjee at snf.stanford.edu (nharjee at snf.stanford.edu) Date: Sun, 10 Feb 2008 22:05:06 -0800 Subject: Comment drytek2 SNF 2008-02-10 22:05:06: Bad startup state Message-ID: Found the chamber vented to atmosphere with a wafer still inside. Placed the wafer on a clean wipe above the chamber. From eenriquez at snf.stanford.edu Mon Feb 11 08:23:33 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 11 Feb 2008 08:23:33 -0800 Subject: Problem drytek2 SNF 2008-02-08 18:35:19: Base pressure not reached Message-ID: Readjusted the crossover pressure from 100 mT back to 20 mT. From rmelamud at snf.stanford.edu Mon Feb 11 16:40:20 2008 From: rmelamud at snf.stanford.edu (rmelamud at snf.stanford.edu) Date: Mon, 11 Feb 2008 16:40:20 -0800 Subject: Comment drytek2 SNF 2008-02-11 16:40:14: Couldn't tune RF Message-ID: Tried to run Process1 - Descum. Couldn't tune RF reflected power to be below 300W. Didn't see plasma. O2 flow was also low - but could be adjusted. -R From eenriquez at snf.stanford.edu Tue Feb 12 13:08:30 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 12 Feb 2008 13:08:30 -0800 Subject: Comment drytek2 SNF 2008-01-16 18:50:56: Chiller was off Message-ID: noted From eenriquez at snf.stanford.edu Tue Feb 12 13:08:43 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 12 Feb 2008 13:08:43 -0800 Subject: Comment drytek2 SNF 2008-02-10 22:05:06: Bad startup state Message-ID: Noted From iwjung at snf.stanford.edu Wed Feb 13 15:28:20 2008 From: iwjung at snf.stanford.edu (iwjung at snf.stanford.edu) Date: Wed, 13 Feb 2008 15:28:20 -0800 Subject: Comment drytek2 SNF 2008-02-13 15:28:20: SF6 flow meter does not go to zero when process is over Message-ID: From eenriquez at snf.stanford.edu Wed Feb 13 17:56:00 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 13 Feb 2008 17:56:00 -0800 Subject: Comment drytek2 SNF 2008-02-13 15:28:20: SF6 flow meter does not go to zero when process is over Message-ID: Zeroed SF6 MFC. MFC might need to be replaced if it the zero continues to drift. From eenriquez at snf.stanford.edu Thu Feb 14 08:55:43 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 14 Feb 2008 08:55:43 -0800 Subject: Comment drytek2 SNF 2008-02-11 16:40:14: Couldn't tune RF Message-ID: Was able to tune the RF with no problems. From eenriquez at snf.stanford.edu Thu Feb 14 08:55:50 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 14 Feb 2008 08:55:50 -0800 Subject: Comment drytek2 SNF 2007-12-21 13:49:18: Replaced view port window Message-ID: Noted