Problem drytek2 SNF 2008-02-08 18:35:19: Base pressure not reached
king at snf.stanford.edu
king at snf.stanford.edu
Fri Feb 8 18:35:20 PST 2008
Process gases begin flowing prematurely at about 75mT. Use Cycle Hold to reach a good base pressure of about 20mT.
More information about the drytek2-pcs
mailing list