From eenriquez at snf.stanford.edu  Thu Jan  3 10:56:39 2008
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Thu, 3 Jan 2008 10:56:39 -0800
Subject: Shutdown drytek2 SNF 2008-01-03 10:56:38: RF error
Message-ID: <mailman.870.1357938289.25682.drytek2-pcs@snf.stanford.edu>




From eenriquez at snf.stanford.edu  Thu Jan  3 14:07:49 2008
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Thu, 3 Jan 2008 14:07:49 -0800
Subject: Shutdown drytek2 SNF 2008-01-03 10:56:38: RF error
Message-ID: <mailman.871.1357938289.25682.drytek2-pcs@snf.stanford.edu>

Chiller was empty.  Refilled chiller and ran test.



From king at snf.stanford.edu  Wed Jan 16 18:50:57 2008
From: king at snf.stanford.edu (king at snf.stanford.edu)
Date: Wed, 16 Jan 2008 18:50:57 -0800
Subject: Comment drytek2 SNF 2008-01-16 18:50:56: Chiller was off
Message-ID: <mailman.872.1357938289.25682.drytek2-pcs@snf.stanford.edu>

The etch chamber seemed a little warm and I noticed the chiller had turned itself off.  It's back on again at 18C and all seems well so far.  The liquid level was OK. 



From dtschoen at snf.stanford.edu  Fri Jan 25 12:17:51 2008
From: dtschoen at snf.stanford.edu (dtschoen at snf.stanford.edu)
Date: Fri, 25 Jan 2008 12:17:51 -0800
Subject: Problem drytek2 SNF 2008-01-25 12:17:50: Cannot adjust SF6
Message-ID: <mailman.873.1357938289.25682.drytek2-pcs@snf.stanford.edu>

I ran a nitride etch and I could not seem to adjust the SF6 flow rate.  It is stuck at 146.  The pot feels a little strange to me.



From eenriquez at snf.stanford.edu  Fri Jan 25 14:29:22 2008
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 25 Jan 2008 14:29:22 -0800
Subject: Problem drytek2 SNF 2008-01-25 12:17:50: Cannot adjust SF6
Message-ID: <mailman.874.1357938289.25682.drytek2-pcs@snf.stanford.edu>

Tightened the potentiometer knob.  Able to adjust the SF6 flow to about 250 sccm.