Problem drytek2 SNF 2008-07-11 00:13:38: Proc #3 RF level Pot

king at snf.stanford.edu king at snf.stanford.edu
Fri Jul 11 00:13:39 PDT 2008


limits out around 425 - 450W; cannot reach 500W for nitride process.  Was tuned to about 20W reflected. 




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