Comment drytek2 SNF 2008-07-15 16:39:58: unnecessary shutdown

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Jul 16 07:50:01 PDT 2008


Sorry you're wrong.  The RF power level was unstable on all three recipe channels.  I observed the power go from 0 W to over 800 W by itself.  One user complained that he over etched his wafer. Please keep sending these very useful comments and thank you for input.




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