Problem drytek2 SNF 2008-07-17 12:25:23: Proc#1 RF level Pot

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Jul 17 13:11:02 PDT 2008


User was concerned about the stability of the RF during his 30 second process.  Suggested warming up the RF generator for 3 minutes and tuning the matching network (with a dummy wafer loaded) before running his actual wafers. 
Ran his process after we warmed up the generator.  The RF power stabilized within 5 seconds.




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