Problem drytek2 SNF 2008-07-17 12:25:23: Proc#1 RF level Pot
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Thu Jul 17 13:11:02 PDT 2008
User was concerned about the stability of the RF during his 30 second process. Suggested warming up the RF generator for 3 minutes and tuning the matching network (with a dummy wafer loaded) before running his actual wafers.
Ran his process after we warmed up the generator. The RF power stabilized within 5 seconds.
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